SafetyClean Room-1

Unam Shared Laboratory Operations Team Contact Info

Please contact with the UNAM personnel In Case Of Emergency Situations During Off-Hours
(Weekdays After 17:30 Or Weekend). The contact details can be found in the laboratories.”

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ALD FIJI
ALD SAVANNAH
LPCVD
PECVD 1
PECVD 2
SPUTTERING TOOL 1
SPUTTERING TOOL 2
THERMAL EVAPORATOR 2 (Cookie)
ICP 615 (Si)
ICP 615 (3-5)
CPD
DICING SAW
NANOSEM
PROBE STATION – SPA
RAPID THERMAL ANNEALING
WIRE BORDER
He LICK DEDEKTOR
HVAC SYSTEM

Abdullah Kafadenk

ELECTROPLATING
THERMAL EVAPORATOR
E-BEAM EVAPORATOR
ASHER
XeF2
MAS ALIGNER NANOIMP
SPINNER 1/2
OPTIC MICROSCOPE 1/2
OPTICAL PROFILOMETER
STYLUS PROFILOMETER

Semih Bozkurt

ORGANIK EVAPORATOR

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Fikret Piri

Fikret-Piri

SCRUBBER
CLEANROOM SUPPLIES
GAS CYLINDERS
ULTRA DI WATER
DEWAR REFILL
ACID BASE SOLV. WET BENCH
CLEANROOM CLOTHES WASHING