{"id":4586,"date":"2024-07-01T13:15:43","date_gmt":"2024-07-01T10:15:43","guid":{"rendered":"https:\/\/unam.bilkent.edu.tr\/facility_new\/?post_type=product&#038;p=4586"},"modified":"2025-01-15T13:15:09","modified_gmt":"2025-01-15T10:15:09","slug":"atomic-layer-deposition-ald-fiji","status":"publish","type":"product","link":"https:\/\/unam.bilkent.edu.tr\/facility\/urun\/atomic-layer-deposition-ald-fiji\/","title":{"rendered":"Atomic Layer Deposition ALD Fiji"},"content":{"rendered":"","protected":false},"excerpt":{"rendered":"<p>Fiji F200 Ald system used for depositing very dense thin thermal oxide of Al2O3, TiO, HfO and Nitride films. It has very uniform 3D coverage over the surface. Typically a few nm to 30 nm thin films deposited. When RF induced you can grow plasma enhanced atomic layer deposition (PE-ALD) thin films.<\/p>\n","protected":false},"featured_media":4719,"template":"","meta":[],"product_brand":[],"product_cat":[123],"product_tag":[],"class_list":["post-4586","product","type-product","status-publish","has-post-thumbnail","product_cat-high-precision-manufacturing","first","instock","taxable","shipping-taxable","purchasable","product-type-simple"],"_links":{"self":[{"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/product\/4586","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/media\/4719"}],"wp:attachment":[{"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/media?parent=4586"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/product_brand?post=4586"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/product_cat?post=4586"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/unam.bilkent.edu.tr\/facility\/wp-json\/wp\/v2\/product_tag?post=4586"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}