Asst. Prof. Onur Tokel, a professor in Bilkent University’s Department of Physics and a Principal Investigator at the Bilkent University National Nanotechnology Research Center (UNAM), has published a scientific article entitled “Laser Nanofabrication Inside Silicon with Spatial Beam Modulation and Anisotropic Seeding” in the prestigious Nature Communications.
In the article, Dr. Tokel discusses developing a controlled nanofabrication capability inside silicon. This advancement has surpassed existing methods by successfully creating completely subsurface nanostructures within silicon with features of 100 ± 20 nm, which is considered a significant step forward for 3D nanophotonic systems, micro/nanofluidic systems, and 3D electronic-photonic integrated systems.
Dr. Tokel is also actively engaged in the “Ultra-Thin, Micro-Grooved/Micro-Channel Glass Production and Processed Glass Technologies” project as part of the A1-1004 Platform. The platform is supported by the TÜBİTAK 1004 Excellence Center Program and is led by UNAM.
You can access Dr. Onur Tokel’s research through the following link:
https://www.nature.com/articles/s41467-024-49303-z
This work is also featured in the IEEE Spectrum magazine:
https://spectrum.ieee.org/photonics-beneath-silicon-surface
