Micro/nano processing technology for metamaterials
Yoshiaki Kanamori Tohoku University Micro/nano processing technology is one of the important elements for achieving the academic progress and industrialization of metamaterials. There are strong expectations for the establishment of micro/nano fabrication technology to produce metamaterials that meet needs. Here, the metamaterials developed in my research group and their microfabrication technologies are discussed. (i) Hydrogen […]